The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2020
Filed:
Apr. 05, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Geetika Bajaj, New Delhi, IN;
Robert Jan Visser, Menlo Park, CA (US);
Nitin Ingle, San Jose, CA (US);
Zihui Li, Santa Clara, CA (US);
Prerna Sonthalia Goradia, Mumbai, IN;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Systems and methods of etching a semiconductor substrate may include flowing an oxygen-containing precursor into a substrate processing region of a semiconductor processing chamber. The substrate processing region may house the semiconductor substrate, and the semiconductor substrate may include an exposed metal-containing material. The methods may include flowing ammonia into the substrate processing region at a temperature above about 200° C. The methods may further include removing an amount of the metal-containing material.