The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2020
Filed:
May. 08, 2013
Applicant:
Shinkawa Ltd., Tokyo, JP;
Inventors:
Tetsuya Utano, Tokyo, JP;
Yuichiro Noguchi, Tokyo, JP;
Assignee:
SHINKAWA LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/3065 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3065 (2013.01); Y10T 29/49002 (2015.01);
Abstract
[Object] To provide a plasma apparatus capable of igniting plasma reliably over a long period. [Solution] The apparatus includes a hollow structural body () having a hollow structure along an axis, a first electrode () disposed inside the hollow structural body (), and a second electrode () having a structure that externally covers a plasma generation area () of the hollow structural body (). The first electrode () has a deformation structure () within the plasma generation area of the hollow structural body.