The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2020
Filed:
Apr. 04, 2016
Nanomechanics, Inc., Oak Ridge, TN (US);
Warren C Oliver, Knoxville, TN (US);
Sudharshan P Pardhasaradhi, Knoxville, TN (US);
Michael P Drake, Knoxville, TN (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A mechanical testing system having a frame, and a stage for holding a sample. An arm for pressing a tool against a surface of the sample. A primary actuator is connected to the frame and applies a primary force and drives the tool relative to the sample, thereby causing the frame to flex. A displacement sensor measures a displacement value comprised of two components, the first component including a distance traveled by the probe into the sample as the primary force is applied, and the second component including a measure of a degree of flex of the frame as the primary force is applied. A compensating actuator is connected to the frame and applies a compensating force that reduces the second component of the displacement value.