The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 25, 2020

Filed:

Aug. 24, 2016
Applicant:

Freescale Semiconductor, Inc., Austin, TX (US);

Inventors:

Philippe Garre, Tempe, AZ (US);

Silvia Garre, Scottsdale, AZ (US);

William DeWitt McWhorter, Goodyear, AZ (US);

Larry Dale Metzler, Phoenix, AZ (US);

Assignee:

NXP USA, Inc., Austin, TX (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 27/00 (2006.01); G01L 19/00 (2006.01);
U.S. Cl.
CPC ...
G01L 27/00 (2013.01); G01L 19/0092 (2013.01);
Abstract

A test chamber is used within a system for testing microelectromechanical systems (MEMS) pressure sensors. The system includes a processor, two air tanks pressurized to different air pressures, a high speed switch mechanism, and the test chamber. The test chamber houses a MEMS pressure sensor to be tested, a control pressure sensor, and a temperature sensor. The MEMS pressure sensor and the control pressure sensor are located in a cavity within the test chamber. The cavity is of minimal size and has a domed inner surface. A response time of the MEMS pressure sensor within the cavity can be characterized by utilizing the system and subjecting the MEMS pressure sensor to a pressure stimulus pulse produced by switching between the two air tanks.


Find Patent Forward Citations

Garre, Philippe. (2020). System, test chamber, and method for response time measurement of a pressure sensor (U.S. Patent No. 10571354). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10571354

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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