The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2020
Filed:
Dec. 10, 2015
Applicants:
American Air Liquide, Inc., Fremont, CA (US);
Glenn Kuchenbeiser, Newark, DE (US);
Claudia Fafard, Newark, DE (US);
Inventors:
Glenn Kuchenbeiser, Newark, DE (US);
Claudia Fafard, Newark, DE (US);
Assignee:
American Air Liquide, Inc., Fremont, CA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/30 (2006.01); C23C 16/455 (2006.01); C07F 7/02 (2006.01); C09D 4/00 (2006.01); C23C 16/50 (2006.01); C23C 16/56 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45553 (2013.01); C07F 7/025 (2013.01); C09D 4/00 (2013.01); C23C 16/30 (2013.01); C23C 16/50 (2013.01); C23C 16/56 (2013.01);
Abstract
Disclosed are organosilane precursors, methods of synthesizing the same, and methods of using the same to deposit silicon-containing films using vapor deposition processes. The disclosed organosilane precursors have the following formula: SiH(RN—(CR)—NR)(NRR)wherein R may each independently be H, a Cto Calkyl group, or a C-Caryl or heterocycle group, x+y+z=4 and n, x, y and z are integers, provided that x≠3 when y=1. Preferably, n=1 to 3, x=0 to 2, y=1 to 2, and z=1 to 3.