The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 25, 2020

Filed:

Apr. 10, 2018
Applicant:

United Microelectronics Corp., Hsinchu, TW;

Inventors:

Neng-Hsing Shen, Hsinchu County, TW;

Chien-Wen Yang, Hsinchu, TW;

Chun-Man Li, Tainan, TW;

Ji-Fu Kung, Taichung, TW;

Ching-Pei Lin, Hsinchu County, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 19/00 (2018.01); C23C 14/54 (2006.01); C23C 14/48 (2006.01); H01L 21/66 (2006.01); G06K 9/00 (2006.01); G05B 15/02 (2006.01); H01L 21/265 (2006.01);
U.S. Cl.
CPC ...
C23C 14/54 (2013.01); C23C 14/48 (2013.01); G05B 15/02 (2013.01); G06K 9/00624 (2013.01); H01L 22/20 (2013.01); G06K 2209/01 (2013.01); H01L 21/265 (2013.01);
Abstract

An apparatus for controlling an operation of a machine includes an optical recognition system, a control unit, and a remote control interface. The optical recognition system is configured to monitor and obtain actual operation information displayed on a panel of a processing machine in accordance with an operation time. The control unit is configured to receive the actual operation information and check the actual operation information with expected operation information. The expected operation information is obtained based on an operation model which is already built up corresponding to a current fabrication process. Deviation information between the actual operation information and the expected operation information is determined and converted into a parameter set. The remote control interface receives the parameter set and converts the parameter set into a control signal set to control the operation of the processing machine.


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