The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2020
Filed:
Dec. 07, 2017
Asml Netherlands B.v., Veldhoven, NL;
Johannes Petrus Sprengers, The Hague, NL;
Christiaan Otten, IJsselstein, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Feedthrough device (), for forming a hermetic seal around signal conductors in a signal conductor group () with a group width. The device comprises a slotted member () and a base (). The base defines a through hole () that extends entirely through the base along a feedthrough direction (X), and is adapted to accommodate the slotted member. The slotted member defines first and second surfaces () on opposite sides associated with the feedthrough direction, and a side surface () facing transverse to the feedthrough direction. The slotted member comprises a slot (), which extends along the feedthrough direction through the slotted member, and opens into the first and second surfaces and into a longitudinal opening () along the side surface. The slot extends transversely into the slotted member up to a slot depth at least equal to the signal conductor group width.