The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2020
Filed:
Sep. 24, 2018
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventor:
Markus Schwab, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G02B 17/06 (2006.01); G03F 7/20 (2006.01); G02B 5/08 (2006.01); G21K 1/06 (2006.01);
U.S. Cl.
CPC ...
G02B 17/0663 (2013.01); G02B 5/0891 (2013.01); G03F 7/70008 (2013.01); G03F 7/70233 (2013.01); G21K 1/067 (2013.01);
Abstract
A projection optical unit images an object field in an image field. The projection optical unit includes a plurality of mirrors guides imaging light from the object field to the image field. At least two of the mirrors are arranged directly behind one another in the beam path of the imaging light for grazing incidence with an angle of incidence of the imaging light which is greater than 60°. This results in an imaging optical unit that can exhibit a well-corrected imageable field with, at the same time, a high imaging light throughput.