The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2020
Filed:
Jun. 05, 2018
Applicants:
Akustica, Inc., Pittsburgh, PA (US);
Robert Bosch Gmbh, Stuttgart, DE;
Inventors:
Jochen Reinmuth, Reutlingen, DE;
Vijaye Rajaraman, Reutlingen, DE;
Daniel Meisel, Pittsburgh, PA (US);
Bernhard Gehl, Wannweil, DE;
Assignees:
Akustica, Inc., Pittsburgh, PA (US);
Robert Bosch GmbH, Stuttgart, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); H04R 1/28 (2006.01); H04R 19/04 (2006.01); H04R 19/00 (2006.01); H04R 7/04 (2006.01);
U.S. Cl.
CPC ...
H04R 19/04 (2013.01); H04R 7/04 (2013.01); H04R 19/005 (2013.01); B81B 2201/0257 (2013.01); H04R 2201/003 (2013.01);
Abstract
A MEMS microphone system with encapsulated movable electrode is provided. The MEMS microphone system comprises a MEMS sensor having an access channel, a plug, and first and second members. The access channel configured to receive the plug is formed on at least one of the first and second member. A vacuum having a pressure different from a pressure outside the MEMS sensor is formed between the first and second members.