The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 04, 2020

Filed:

Aug. 13, 2018
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Donald F. Canaperi, Bridgewater, CT (US);

Daniel A. Corliss, Waterford, NY (US);

Dario Goldfarb, Dobbs Ferry, NY (US);

Dinesh Gupta, Hopewell Junction, NY (US);

Fee Li Lie, Albany, NY (US);

Kamal K. Sikka, Poughkeepsie, NY (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/473 (2006.01); H01L 23/427 (2006.01); F28F 3/12 (2006.01); H01L 23/373 (2006.01); F28F 3/04 (2006.01);
U.S. Cl.
CPC ...
H01L 23/473 (2013.01); F28F 3/048 (2013.01); F28F 3/12 (2013.01); H01L 23/373 (2013.01); H01L 23/427 (2013.01); F28F 2260/02 (2013.01);
Abstract

A semiconductor microcooler is fabricated by forming fins in a semiconductor substrate and forming a metal layer upon the fins. A stacked microcooler may be formed by stacking a plurality of semiconductor microcoolers. The microcoolers may be positioned such that the fins of each microcooler are aligned. One or more microcoolers may be thermally connected to a surface of a coolant conduit that is thermally connected to an electronic device heat generating device, such as an integrated circuit (IC) chip, or the like. Heat from the electronic device heat generating device may transfer to the one or more microcoolers. A flow of cooled liquid may be introduced through the conduit and heat from the one or more microcoolers may transfer to the liquid coolant.


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