The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2020
Filed:
Dec. 18, 2015
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Govinda Raj, Bangalore, IN;
Kadthala R. Narendrnath, San Jose, CA (US);
Bopanna Ichettira Vasantha, Bangalore, IN;
Simon Yavelberg, Cupertino, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); H01L 21/67 (2006.01); C23C 16/458 (2006.01); B33Y 10/00 (2015.01); B33Y 80/00 (2015.01);
U.S. Cl.
CPC ...
H01L 21/68735 (2013.01); C23C 16/4585 (2013.01); H01L 21/67017 (2013.01); H01L 21/67098 (2013.01); B33Y 10/00 (2014.12); B33Y 80/00 (2014.12);
Abstract
An edge ring and process for fabricating an edge ring are disclosed herein. In one embodiment, an edge ring includes an annular body and a plurality of thermal breaks disposed within the annular body. The thermal breaks are disposed perpendicular to a center line of the annular body of the edge ring.