The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2020
Filed:
Aug. 28, 2014
Applicant:
Aselta Nanographics, Grenoble, FR;
Inventors:
Nader Jedidi, Lausanne, CH;
Patrick Schiavone, Villard Bonnot, FR;
Jean-Hervé Tortai, La Tronche, FR;
Thiago Figueiro, Grenoble, FR;
Assignee:
ASELTA NANOGRAPHICS, Grenoble, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/304 (2006.01); H01J 37/285 (2006.01); H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
H01J 37/304 (2013.01); H01J 37/285 (2013.01); H01J 37/3175 (2013.01); H01J 2237/2487 (2013.01);
Abstract
A method for projecting an electron beam onto a target includes correction of the scattering effects of the electrons in the target. This correction is made possible by a calculation step of a point spread function having a radial variation according to a piecewise polynomial function.