The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2020
Filed:
Oct. 16, 2012
Applicant:
Quantum Innovations, Inc., Central Point, OR (US);
Inventors:
Norman L. Kester, Central Point, OR (US);
Cliff J. Leidecker, Rogue River, OR (US);
Assignee:
QUANTUM INNOVATIONS, INC., Central Point, OR (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/458 (2006.01); C23C 14/56 (2006.01); C23C 14/50 (2006.01);
U.S. Cl.
CPC ...
C23C 16/458 (2013.01); C23C 14/50 (2013.01); C23C 14/568 (2013.01);
Abstract
A deposition system includes a system housing having a housing interior, a fixture transfer assembly having a generally sloped fixture transfer rail extending through the housing interior, a plurality of processing chambers connected by the fixture transfer rail, a controller interfacing with the processing chambers and at least one fixture carrier assembly carried by the fixture transfer rail and adapted to contain one substrate. The fixture carrier assembly travels along the fixture transfer rail under influence of gravity.