The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2020
Filed:
Jan. 29, 2019
Gigaphoton Inc., Tochigi, JP;
Takanobu Ishihara, Oyama, JP;
Gigaphoton Inc., Tochigi, JP;
Abstract
In a chamber apparatus that includes a chamber and a target generation device configured to supply tin as a target material to a certain region in the chamber, oxidation of molten tin is prevented. A chamber apparatus includes: a chamber (); a target generation device including a tank part () configured to store tin T, a variable temperature device () configured to change a temperature of the tin T in the tank part (), a pressure regulator () configured to change a pressure in the tank part (), and a nozzle part () configured to eject liquefied tin T; a gas source () configured to supply gas containing hydrogen gas into the chamber (); an evacuation device () configured to evacuate gaseous body in the chamber (); and a controller () configured to control generation of a target, in which the controller () controls the evacuation device () to maintain an oxygen partial pressure in the chamber () at 4×10Pa or lower.