The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 28, 2020

Filed:

Nov. 13, 2018
Applicant:

Toyota Jidosha Kabushiki Kaisha, Toyota-shi, Aichi-ken, JP;

Inventors:

Katsunori Danno, Obu, JP;

Kensaku Yamamoto, Kariya, JP;

Yusuke Yamashita, Nagakute, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/15 (2006.01); H01L 29/16 (2006.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 29/10 (2006.01); H01L 29/08 (2006.01); H01L 29/423 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1608 (2013.01); H01L 29/0865 (2013.01); H01L 29/1095 (2013.01); H01L 29/4236 (2013.01); H01L 29/66734 (2013.01); H01L 29/7813 (2013.01);
Abstract

A switching element may include a SiC substrate including an off-angle; a trench provided in an upper surface of the SiC substrate and extending along an off-direction of the SiC substrate in a plan view of the upper surface; a gate insulating film; and a gate electrode. The SiC substrate may include a source region of n-type; a contact region of p-type; a body region of p-type being in contact with the gate insulating film below the source region; a drift region of n-type being in contact with the gate insulating film below the body region; and low lifetime regions located in a range between the drift region and at least one of the source region and the contact region. The low lifetime regions may be arranged along the off-direction with intervals, and at least a part of the body region may be provided in the intervals.


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