The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 28, 2020

Filed:

Aug. 02, 2018
Applicant:

Micron Technology, Inc., Boise, ID (US);

Inventor:

Naoyoshi Kobayashi, Higashihiroshima, JP;

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/108 (2006.01); H01L 21/768 (2006.01); H01L 21/02 (2006.01); H01L 21/3213 (2006.01); H01L 21/3205 (2006.01); H01L 23/532 (2006.01); H01L 23/528 (2006.01);
U.S. Cl.
CPC ...
H01L 27/10888 (2013.01); H01L 21/0217 (2013.01); H01L 21/02164 (2013.01); H01L 21/02238 (2013.01); H01L 21/02532 (2013.01); H01L 21/02595 (2013.01); H01L 21/32055 (2013.01); H01L 21/32133 (2013.01); H01L 21/76802 (2013.01); H01L 21/76846 (2013.01); H01L 21/76877 (2013.01); H01L 21/76888 (2013.01); H01L 23/528 (2013.01); H01L 23/53271 (2013.01); H01L 23/53295 (2013.01); H01L 27/10885 (2013.01);
Abstract

Disclosed herein is a method that includes: forming a composite layer, the composite layer comprising first and second insulative materials and a first polysilicon layer that is between the first and second insulative materials, forming a hole in the composite layer, the hole penetrating through the composite layer to define respective edge portions of the first and second insulative materials and the first polysilicon layer, and converting the edge portion of the first polysilicon layer into third insulative material so that the third insulative material is between the respective edges of the first and second insulative materials.


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