The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2020
Filed:
Nov. 13, 2015
Applicant:
Intel Corporation, Santa Clara, CA (US);
Inventors:
Balu Pathangey, Socttsdale, AZ (US);
Mihir A. Oka, Chandler, AZ (US);
Andrew Proctor, Chandler, AZ (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); H01L 21/78 (2006.01); H01L 25/065 (2006.01); H01L 25/18 (2006.01);
U.S. Cl.
CPC ...
H01L 23/562 (2013.01); H01L 21/67132 (2013.01); H01L 21/6836 (2013.01); H01L 21/78 (2013.01); H01L 23/564 (2013.01); H01L 25/0657 (2013.01); H01L 25/18 (2013.01); H01L 2221/6834 (2013.01); H01L 2221/68327 (2013.01); H01L 2225/06513 (2013.01); H01L 2225/06582 (2013.01);
Abstract
Described is an apparatus which comprises: a die having a first side and a second side opposite to the first side; a die backside film (DBF) or die attach film (DAF) disposed over the first side of the die; and a fluorocarbon layer disposed over the DBF or DAF. Described is a method which comprises: applying a die backside film (DBF) over a first side of a die, wherein the die has a second side which metal bumps; and applying a plasma polymerization process to treat the DBF with a fluorocarbon plasma.