The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2020
Filed:
Feb. 14, 2017
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Akira Imamura, Tokyo, JP;
Mitsuru Miyazaki, Tokyo, JP;
Junji Kunisawa, Tokyo, JP;
Shunsuke Matsuzawa, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 1/04 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67051 (2013.01);
Abstract
A substrate cleaning apparatus comprises: a cleaning memberthat comes into contact with a substrate W and cleans the substrate W; a member rotating unitthat rotates the cleaning member; a pressing drive unitthat presses the cleaning memberagainst the substrate W; a torque detecting unitfor detecting torque applied to the member rotating unit; and a control unitthat controls pressing force on the basis of a result of detection by the torque detecting unit