The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2020
Filed:
May. 09, 2018
Mks Instruments, Inc., Andover, MA (US);
Aaron T. Radomski, Conesus, NY (US);
Ky Luu, Victor, NY (US);
Larry J. Fisk, II, Fairport, NY (US);
Ross Reinhardt, Rochester, NY (US);
Matthew G. Harrington, Rochester, NY (US);
Amish Rughoonundon, Pittsford, NY (US);
Jesse N. Klein, West Henrietta, NY (US);
Aaron M. Burry, Ontario, NY (US);
MKS Instruments, Inc., Andover, MA (US);
Abstract
A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.