The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 28, 2020

Filed:

Feb. 07, 2018
Applicant:

Jeol Ltd., Tokyo, JP;

Inventor:

Kazuya Omoto, Tokyo, JP;

Assignee:

JEOL Ltd., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/05 (2006.01); H01J 37/28 (2006.01); H01J 37/147 (2006.01);
U.S. Cl.
CPC ...
H01J 37/05 (2013.01); H01J 37/1472 (2013.01); H01J 37/28 (2013.01); H01J 2237/057 (2013.01); H01J 2237/152 (2013.01); H01J 2237/24485 (2013.01); H01J 2237/2802 (2013.01);
Abstract

There is provided an energy filter capable of being simplified in structure and of achieving low aberrations. The energy filter () includes a first sector magnet () and a second sector magnet (). The first and second magnets () are configured mirror-symmetrically with respect to a symmetry plane (M). There are one focal point of crossover in the X direction and one focal point of crossover in the Y direction. The focal point of crossover in the X direction and the focal point of crossover in the Y direction are at an energy dispersive plane (S). There are two focal points of image in the X direction and two focal points of image in the Y direction. The focal points of image in the X direction and the focal points of image in the Y direction are at the symmetry plane (M) and at an achromatic plane (A).


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