The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2020
Filed:
Oct. 26, 2016
Asml Netherlands B.v., Veldhoven, NL;
Alexander Petrus Josephus Van Lankvelt, Veghel, NL;
Ingmar August Kerp, Eindhoven, NL;
Richardus Simon Antonius Oostveen, Malden, NL;
Marco Hendrikus Hermanus Oude Nijhuis, Eindhoven, NL;
Robertus Mathijs Gerardus Rijs, Sevenum, NL;
Olav Johannes Seijger, Veldhoven, NL;
Alexander Maurice Steenhoek, Duizel, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
The invention relates to a vibration isolation system (VIS) comprising: —a base (); —a coupling element () to be coupled to a vibration sensitive object; —a vibration isolator (-) arranged between the base and the coupling element; —a bellows () to be arranged between the VIS coupling element or the vibration isolator and a protective housing () surrounding the vibration sensitive object; and —one or more separate damping elements to act on convolutions of the bellows.