The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2020
Filed:
Nov. 01, 2017
Nxp Usa, Inc., Austin, TX (US);
Jerome Romain Enjalbert, Tournefeuille, FR;
NXP USA, Inc., Austin, TX (US);
Abstract
A micro-electro-mechanical system (MEMS) device and a method of testing a MEMS device. The device includes a MEMS sensor having first and second mobile elements, first and second electrodes arranged to deflect the mobile elements by the application of test voltages, and a differential detector circuit. The device also includes an input multiplexer circuit configured selectively to connect each electrode to a test voltage source to apply a plurality of test voltages to deflect the mobile elements during a test mode. The test voltages comprise a set of monotonically increasing test voltages and a set of monotonically decreasing voltages for performing a C(V) sweep to test for stiction. The device further includes an output multiplexer circuit configured selectively to connect the first mobile element and/or the second mobile element to a single one of the inputs of the detector circuit to detect the deflection of the mobile element.