The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 21, 2020

Filed:

Jul. 12, 2018
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Kam-Leung Lee, Putnam Valley, NY (US);

Deborah A. Neumayer, Danbury, CT (US);

Son Nguyen, Schenectady, NY (US);

Martin M. Frank, Dobbs Ferry, NY (US);

Vijay Narayanan, New York, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 21/324 (2006.01); H01L 21/768 (2006.01); H01L 21/02 (2006.01); H01L 49/02 (2006.01); H01L 23/522 (2006.01); H01L 45/00 (2006.01); G06N 3/063 (2006.01); H01L 27/11502 (2017.01); H01L 43/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/324 (2013.01); H01L 21/02118 (2013.01); H01L 21/76849 (2013.01); H01L 21/76895 (2013.01); H01L 23/5222 (2013.01); H01L 28/40 (2013.01); G06N 3/0635 (2013.01); H01L 27/11502 (2013.01); H01L 43/02 (2013.01); H01L 45/06 (2013.01); H01L 45/08 (2013.01);
Abstract

A conformal disposable absorber is disclosed which is capable of providing efficient heat transfer to an embedded memory device during a localized absorber anneal, without adversary impacting the back-end-of-the-line (BEOL) structure. The disposable absorber is composed of an amorphous carbonitride material that can be designed to have a low reflection coefficient for laser/flash illumination, and a high extinction coefficient for efficient laser/flash illumination absorption. The disposable absorber is formed at a temperature of 400° C. or less.


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