The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2020
Filed:
Feb. 20, 2018
Applicant:
Imec Vzw, Leuven, BE;
Inventors:
Umberto Celano, Kessel-Lo, BE;
Kristof Paredis, Oud-Heverlee, BE;
Wilfried Vandervorst, Mechelen, BE;
Assignee:
IMEC VZW, Leuven, BE;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/28 (2006.01); B82Y 40/00 (2011.01); H01J 37/22 (2006.01); H01J 37/304 (2006.01); H01J 37/305 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); H01J 37/28 (2013.01); H01J 37/304 (2013.01); H01J 37/3053 (2013.01); H01J 2237/2802 (2013.01); H01J 2237/31745 (2013.01);
Abstract
The disclosure is related to a method and apparatus for transmission electron microscopy wherein a TEM specimen is subjected to at least one thinning step by scratching at least an area of the specimen with an SPM probe, and wherein the thinned area is subjected to an SPM acquisition step, using the same SPM probe or another probe.