The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 21, 2020

Filed:

Jan. 09, 2018
Applicant:

The Regents of the University of Michigan, Ann Arbor, MI (US);

Inventors:

Stephen Maldonado, Ann Arbor, MI (US);

Joshua DeMuth, Ann Arbor, MI (US);

Eli Fahrenkrug, Ann Arbor, MI (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 19/12 (2006.01); H01L 21/28 (2006.01); H01M 4/36 (2006.01); H01L 21/02 (2006.01); C30B 19/06 (2006.01); C30B 19/10 (2006.01); C30B 29/04 (2006.01); C30B 29/06 (2006.01); C30B 29/08 (2006.01); C30B 30/02 (2006.01); H01M 10/02 (2006.01); H01M 8/06 (2016.01);
U.S. Cl.
CPC ...
C30B 19/12 (2013.01); C30B 19/06 (2013.01); C30B 19/103 (2013.01); C30B 29/04 (2013.01); C30B 29/06 (2013.01); C30B 29/08 (2013.01); C30B 30/02 (2013.01); H01L 21/02532 (2013.01); H01L 21/02623 (2013.01); H01L 21/02628 (2013.01); H01L 21/28176 (2013.01); H01M 4/36 (2013.01); H01M 10/02 (2013.01); H01M 8/06 (2013.01); H01M 2300/0002 (2013.01); H01M 2300/0085 (2013.01);
Abstract

Electrochemical liquid phase epitaxy (ec-LPE) processes and devices are provided that can form precipitated epitaxial crystalline films or layers on a substrate. The precipitated films may comprise a semiconductor, such as germanium, silicon, or carbon. Dissolution into, saturation within, and precipitation of the semiconductor from a liquid metal electrode (e.g., Hg pool) near an interface region with a substrate yields a polycrystalline semiconductor material deposited as an epitaxial film. Reactor cells for use in an electrochemical liquid phase epitaxy (ec-LPE) device are also provided that include porous membranes to facilitate formation of the precipitated epitaxial crystalline films.


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