The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2020
Filed:
Aug. 24, 2018
Applicant:
Mks Instruments, Inc., Andover, MA (US);
Inventors:
David J. Coumou, Webster, NY (US);
Dennis M. Brown, Pittsford, NY (US);
Jeongseok Jang, Seoul, KR;
Jin Huh, Daejeon, KR;
Assignee:
MKS Instruments, inc., Andover, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 7/42 (2006.01); H03H 7/46 (2006.01); H01J 37/32 (2006.01); H01P 5/19 (2006.01); H03H 7/48 (2006.01);
U.S. Cl.
CPC ...
H03H 7/42 (2013.01); H01J 37/32183 (2013.01); H01P 5/19 (2013.01); H03H 7/46 (2013.01); H03H 7/48 (2013.01); H01J 2237/334 (2013.01); H01J 2237/3323 (2013.01);
Abstract
A single input multiple output plasma control system includes a splitter that receives a single input and generates multiple outputs. Each output from the splitter is provided to a load. The splitter includes branch circuits connected between selected splitter outputs. The branch circuits control voltage, current, power, frequency, or phase between each branch to enable controlling a predetermined relationship between the voltage, current, power, impedance, frequency, or phase measured at each load.