The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2020
Filed:
Mar. 13, 2018
Disco Corporation, Tokyo, JP;
Hideaki Tanaka, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A processing method for a workpiece includes: a holding step of holding the workpiece by a chuck table; a groove forming step of moving the chuck table in a processing feeding direction at a first speed, and sequentially cutting a plurality of division lines extending in a first direction by a first cutting blade to form the workpiece with grooves along the division lines; a first deep-cutting step of further cutting the grooves, by a second cutting blade, to thereby deep-cut the grooves, during when the groove forming step is performed; and a second deep-cutting step of moving the chuck table in the processing feeding direction at a second speed higher than the first speed, and further cutting by the second cutting blade those of the grooves which have not been deep-cut in the first deep-cutting step, to thereby deep-cut those grooves, after the groove forming step.