The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2020
Filed:
Apr. 01, 2013
Fujikin Incorporated, Osaka, JP;
Kouji Nishino, Osaka, JP;
Ryousuke Dohi, Osaka, JP;
Kaoru Hirata, Osaka, JP;
Katsuyuki Sugita, Osaka, JP;
Nobukazu Ikeda, Osaka, JP;
FUJIKIN INCORPORATED, Osaka, JP;
Abstract
A gas divided flow supplying apparatus, including a control valve, a pressure type flow control unitconnected to a process gas inlet, a gas supply main pipeconnected to the downstream side of control valve, a plurality of branched pipe passagesconnected in parallel to the downstream side of main pipe, opening and closing valvesinterposed in the respective branched pipe passages, orificesprovided on the downstream sides of valves, a temperature sensorprovided near the process gas passage between the control valveand the orifices, a pressure sensorprovided in the process gas passage between the control valveand the orifices, divided gas flow outletsprovided on the outlet sides of the orifices, and an arithmetic and control unit