The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2020
Filed:
Jun. 26, 2015
Jenoptik Optical Systems Gmbh, Jena, DE;
Christian Ziener, Jena, DE;
JENOPTIK Optical Systems GmbH, Jena, DE;
Abstract
The approach presented here provides a membrane unit () comprising micro-optical structures (), which comprises a wafer () as carrier basis of the micro-optical structures (), an intermediate substrate () connected to the wafer (), and a carrier () connected to the intermediate substrate (), wherein the coefficients of thermal expansion of the wafer (), of the intermediate substrate () and of the carrier () are dimensioned such that a coefficient of expansion of the carrier () is greater than a coefficient of expansion of the intermediate substrate () and the coefficient of expansion of the intermediate substrate () is greater than or equal to a coefficient of expansion of the wafer ().