The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 07, 2020

Filed:

Nov. 26, 2016
Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

Archana Venugopal, Dallas, TX (US);

Benjamin Stassen Cook, Rockwall, TX (US);

Luigi Colombo, Dallas, TX (US);

Robert Reid Doering, Garland, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/367 (2006.01); H01L 21/768 (2006.01); H01L 23/373 (2006.01); H01L 23/522 (2006.01);
U.S. Cl.
CPC ...
H01L 23/367 (2013.01); H01L 21/76879 (2013.01); H01L 23/3677 (2013.01); H01L 23/373 (2013.01); H01L 23/3733 (2013.01); H01L 23/3736 (2013.01); H01L 23/5226 (2013.01); H01L 2224/48463 (2013.01);
Abstract

An integrated circuit has a thermal routing structure above a top interconnect level. The top interconnect level includes interconnects connected to lower interconnect levels, and does not include bond pads, probe pads, input/output pads, or a redistribution layer to bump bond pads. The thermal routing structure extends over a portion, but not all, of a plane of the integrated circuit containing the top interconnect level. The thermal routing structure includes a layer of nanoparticles in which adjacent nanoparticles are attached to each other. The layer of nanoparticles is free of an organic binder material. The thermal routing structure has a thermal conductivity higher than the metal in the top interconnect level. The layer of nanoparticles is formed by an additive process.


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