The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2020
Filed:
Nov. 21, 2016
Applicant:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Inventors:
Shih-Ming Chang, Zhubei, TW;
Kuei-Liang Lu, Hsinchu, TW;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01); H01L 23/52 (2006.01); H01L 21/027 (2006.01); H01L 27/02 (2006.01); H01L 23/528 (2006.01); G03F 1/00 (2012.01);
U.S. Cl.
CPC ...
G06F 17/5072 (2013.01); G06F 17/5068 (2013.01); G06F 17/5081 (2013.01); H01L 21/027 (2013.01); H01L 23/528 (2013.01); H01L 27/0207 (2013.01); G03F 1/144 (2013.01); G06F 2217/06 (2013.01); H01L 2924/0002 (2013.01);
Abstract
An integrated circuit device includes first and second features, each including an end portion arranged along a common axis, and separated by a space. The end portion of the first feature includes a first indention adjacent to the space. The end portion of the second feature includes a first indention adjacent to the space, mirroring the first indention of the first feature about the space. The end portions are substantially similar in shape.