The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2020
Filed:
Dec. 27, 2016
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Andrew V. Hill, Berkley, CA (US);
Gregory R. Brady, San Jose, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 17/00 (2006.01); G02B 17/02 (2006.01); G02B 17/06 (2006.01); G02B 21/16 (2006.01); G02B 21/36 (2006.01); G02B 27/00 (2006.01);
U.S. Cl.
CPC ...
G02B 17/008 (2013.01); G02B 17/023 (2013.01); G02B 17/0657 (2013.01); G02B 17/0663 (2013.01); G02B 21/16 (2013.01); G02B 21/361 (2013.01); G02B 27/0025 (2013.01);
Abstract
An optical relay system includes four or more reflective optical elements oriented in a tilted configuration. Each of the four or more reflective optical elements is tilted about one of four or more tilt axes. Further, the four or more tilt axes are oriented to correct for aberrations induced by the tilted configuration.