The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2020
Filed:
May. 09, 2017
Applicant:
Oxford Instruments Nanotechnology Tools Limited, Oxon, GB;
Inventors:
Christian Lang, Oxon, GB;
James Corrin, Oxon, GB;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/00 (2006.01); G01N 23/2252 (2018.01); G06K 9/00 (2006.01);
U.S. Cl.
CPC ...
G01N 23/2252 (2013.01); G06K 9/00127 (2013.01); G01N 2223/079 (2013.01); G01N 2223/321 (2013.01); G01N 2223/401 (2013.01);
Abstract
A method and apparatus for analysis of a specimen in a microscope are provided. A first survey is performed that collects analytical data from a region of interest on the specimen surface using a first set of conditions. A second survey is performed that collects additional analytical data from selected parts of the region of interest on the specimen surface using a second set of conditions, different from the first set of conditions. The analytical data from the first survey is used to select the parts used for data collection in the second survey and to decide the order in which they are used.