The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2020
Filed:
Oct. 27, 2017
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Inventors:
Min-Ho Rim, Hwaseong-si, KR;
Jung-Soo Kim, Hwaseong-si, KR;
Young-Hoon Sohn, Incheon, KR;
Yu-Sin Yang, Seoul, KR;
Chung-Sam Jun, Suwon-si, KR;
Yun-Jung Jee, Seongnam-si, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01); H01L 21/28 (2006.01); G01N 21/95 (2006.01); G06T 7/00 (2017.01); H01L 27/11556 (2017.01); H01L 21/66 (2006.01); G02B 27/09 (2006.01); H01L 27/11582 (2017.01); G02B 5/00 (2006.01);
U.S. Cl.
CPC ...
G01N 21/8806 (2013.01); G01N 21/9501 (2013.01); G02B 27/0944 (2013.01); G02B 27/0988 (2013.01); G06T 7/001 (2013.01); H01L 22/12 (2013.01); H01L 27/11556 (2013.01); H01L 29/40114 (2019.08); H01L 29/40117 (2019.08); G01N 2201/061 (2013.01); G01N 2201/063 (2013.01); G06T 2207/30148 (2013.01); H01L 27/11582 (2013.01);
Abstract
An optical measuring method includes generating a Bessel beam, filtering the Bessel beam to generate a focused Bessel beam, vertically irradiating the focused Bessel beam onto a substrate in which an opening is formed, and detecting light reflected from the substrate to obtain an image of a bottom surface of the opening.