The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 07, 2020

Filed:

Dec. 22, 2017
Applicant:

Fujifilm Corporation, Tokyo, JP;

Inventors:

Akinori Shibuya, Haibara-gun, JP;

Yu Iwai, Haibara-gun, JP;

Takeshi Kawabata, Haibara-gun, JP;

Ichiro Koyama, Haibara-gun, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08G 73/10 (2006.01); C08G 73/22 (2006.01); C08F 110/02 (2006.01); C08F 136/00 (2006.01); C08F 290/14 (2006.01); G03F 7/031 (2006.01); G03F 7/038 (2006.01); H01L 21/02 (2006.01); G03F 7/023 (2006.01); G03F 7/037 (2006.01); C08G 73/14 (2006.01);
U.S. Cl.
CPC ...
C08G 73/10 (2013.01); C08F 110/02 (2013.01); C08F 136/00 (2013.01); C08F 290/145 (2013.01); C08G 73/105 (2013.01); C08G 73/1007 (2013.01); C08G 73/1042 (2013.01); C08G 73/14 (2013.01); C08G 73/22 (2013.01); G03F 7/0233 (2013.01); G03F 7/031 (2013.01); G03F 7/037 (2013.01); G03F 7/0387 (2013.01); G03F 7/0388 (2013.01); H01L 21/02118 (2013.01); C08F 2500/06 (2013.01);
Abstract

Provided are photosensitive resin compositions having a wide exposure latitude, a precursor composition for providing such a photosensitive resin composition, a method for producing a precursor composition, a cured film, a method for producing a cured film; and a semiconductor device. The precursor composition is a precursor composition containing at least one kind of heterocycle-containing polymer precursor, in which the heterocycle-containing polymer precursor is selected from a polyimide precursor and a polybenzoxazole precursor; and the dispersity which is a weight-average molecular weight/a number-average molecular weight of the heterocycle-containing polymer precursor is 2.5 or more.


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