The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2019
Filed:
Nov. 15, 2018
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Dirk Schaffer, Jena, DE;
Jens Prochnau, Oberkochen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 7/182 (2006.01); G02B 7/18 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70891 (2013.01); G02B 7/181 (2013.01); G02B 7/182 (2013.01); G03F 7/70825 (2013.01);
Abstract
A connection arrangement for connecting an optical component of an optical imaging arrangement to a support unit of a support structure includes: a connecting element unit having a support interface end with support interface section; and a component interface end with a component interface section.