The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2019
Filed:
Feb. 16, 2018
Asml Netherlands B.v., Veldhoven, NL;
Johan Gertrudis Cornelis Kunnen, Weert, NL;
Johannes Henricus Wilhelmus Jacobs, Heeze, NL;
Coen Cornelis Wilhelmus Verspaget, Helmond, NL;
Ronald Van Der Ham, Maarheeze, NL;
Ivo Adam Johannes Thomas, Son, NL;
Martijn Houben, 's-Hertogenbosch, NL;
Thibault Simon Mathieu Laurent, Eindhoven, NL;
Gregory Martin Mason Corcoran, Eindhoven, NL;
Ruud Hendrikus Martinus Johannes Bloks, Helmond, NL;
Gerben Pieterse, Eindhoven, NL;
Pieter Lein Joseph Gunter, Weert, NL;
Marinus Jan Remie, Eindhoven, NL;
Sander Catharina Reinier Derks, Budel, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A support table configured to support a substrate, the support table having a support section to support a substrate and a conditioning system to supply heat energy to and/or remove heat energy from the support section, wherein the conditioning system comprises a plurality of conditioning units that are independently controllable.