The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 31, 2019

Filed:

Dec. 18, 2018
Applicant:

Carl Zeiss Smt Gmbh, Oberkochen, DE;

Inventors:

Roland Pilz, Aalen, DE;

Thomas Petasch, Aalen, DE;

Assignee:

Carl Zeiss SMT GmbH, Oberkochen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 21/33 (2006.01); G02B 27/00 (2006.01); G02B 1/14 (2015.01); G02B 1/18 (2015.01); G02B 7/02 (2006.01);
U.S. Cl.
CPC ...
G03F 7/7015 (2013.01); G02B 1/14 (2015.01); G02B 1/18 (2015.01); G02B 7/028 (2013.01); G02B 21/33 (2013.01); G02B 27/0006 (2013.01); G03F 7/70316 (2013.01); G03F 7/70341 (2013.01); G03F 7/70916 (2013.01);
Abstract

An optical element for transmitting radiation includes: a first surface region surrounding an optically used area of the optical element; and a second surface region that adjoins the first surface region. A circumferential edge is formed between the first and second surface regions. The optical element further includes a one-piece film which covers the first surface region, the edge and the second surface region. The film includes a hydrophobic material at least on its side facing away from the first and the second surface regions. An optical assembly includes at least one such optical element. A method produces such an optical element.


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