The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2019
Filed:
May. 06, 2019
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Masahiro Kobayashi, Iwate, JP;
Tamotsu Hatakeyama, Iwate, JP;
Harunari Hasegawa, Iwate, JP;
Michihiro Takahashi, Iwate, JP;
Daisuke Yamanaka, Iwate, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G 49/05 (2006.01); B01J 19/24 (2006.01);
U.S. Cl.
CPC ...
B65G 49/05 (2013.01); B01J 19/2415 (2013.01);
Abstract
A method for conveying a reaction tube unit including a vertical reaction tube and a gas supply pipe provided at a distance from an inner wall of the vertical reaction tube along a longitudinal direction thereof, the method includes: arranging a buffer inside the reaction tube between the inner wall and the gas supply pipe to alleviate a collision; placing the reaction tube unit attached with the buffer on a carriage via a vibration isolator; and conveying the reaction tube unit by moving the carriage.