The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2019
Filed:
Jan. 02, 2018
Applied Materials, Inc., Santa Clara, CA (US);
Dale R. Du Bois, Los Gatos, CA (US);
Juan Carlos Rocha-Alvarez, San Carlos, CA (US);
Karthik Janakiraman, San Jose, CA (US);
Hari K. Ponnekanti, San Jose, CA (US);
Sanjeev Baluja, Campbell, CA (US);
Prajeeth Wilton, Chennai, IN;
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
The present disclosure generally relates to semiconductor process equipment used to transfer semiconductor substrates between process chambers. More specifically, embodiments described herein are related to systems and methods used to transfer, or swap, semiconductor substrates between process chambers using a transport device that employs at least two blades for the concurrent transfer of substrates between processing chambers.