The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2019
Filed:
Jun. 21, 2016
Asml Netherlands B.v., Veldhoven, NL;
Andre Bernardus Jeunink, Bergeijk, NL;
Robbert De Jong, Eindhoven, NL;
Martinus Hendrikus Antonius Leenders, Rhoon, NL;
Evelyn Wallis Pacitti, Eindhoven, NL;
Thomas Poiesz, Veldhoven, NL;
Frank Pieter Albert Van Den Berkmortel, Deurne, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A support apparatus configured to support an object, the support apparatus includes a support body including an object holder to hold an object; an opening in the support body adjacent to an edge of the object holder; a channel in fluid communication with the opening via each of a plurality of passageways in the support body; and a passageway liner mounted in at least one of the plurality of passageways, the passageway liner being thermally insulating to substantially thermally decouple the support body from fluid in the at least one of the plurality of passageways.