X-ray fluorescence spectrometer

Abstract

Provided is an X-ray fluorescence spectrometer, which has a simple structure, and is capable of promptly performing high-accuracy analysis. The X-ray fluorescence spectrometer according to the present invention includes: an X-ray source () configured to irradiate a sample () with primary X-rays; a spectroscopic device () configured to disperse secondary X-rays emitted from the sample (); an energy-dispersive detector () configured to measure an intensity of the secondary X-rays; a retracting mechanism () configured to retract the spectroscopic device () from a path of the secondary X-rays; a scanning mechanism (), which is configured to continuously move the detector () between an auxiliary measurement area () for measuring the secondary X-rays in a state where the spectroscopic device () is retracted and a main measurement area () for measuring the dispersed secondary X-rays; a storage device () configured to store, in advance, a ratio between a background intensity measured in the auxiliary measurement area () and a background intensity measured in the main measurement area (); and an arithmetic device () configured to perform correction and quantitative analysis, the correction including subtracting a value, which is obtained by multiplying the background intensity in the auxiliary measurement area () by the ratio, from a measured intensity in the main measurement area ().