The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2019
Filed:
Oct. 14, 2014
Rigaku Corporation, Akishima-shi, Tokyo, JP;
Kiyoshi Ogata, Tokyo, JP;
Kazuhiko Omote, Tokyo, JP;
Yoshiyasu Ito, Tokyo, JP;
Hiroshi Motono, Tokyo, JP;
Muneo Yoshida, Tokyo, JP;
Hideaki Takahashi, Tokyo, JP;
RIGAKU CORPORATION, Tokyo, JP;
Abstract
An X-ray thin film inspection device according to the present invention has an X-ray irradiation unitmounted in a first rotation arm, an X-ray detectormounted in a second rotation arm, a fluorescence X-ray detectorfor detecting fluorescent X-ray occurring from an inspection target due to irradiation of X-ray, a temperature measuring unitfor measuring the temperature corresponding to the temperature of the X-ray thin film inspection device, and a temperature correcting system (central processing unit) for correcting an inspection position on the basis of the temperature measured by the temperature measuring unit