The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2019
Filed:
Jan. 15, 2019
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Ralf Ameling, Aalen, DE;
Markus Hauf, Ulm, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D 5/24 (2006.01); G03F 7/20 (2006.01); G02B 26/08 (2006.01); G02B 19/00 (2006.01); G02B 26/10 (2006.01);
U.S. Cl.
CPC ...
G01D 5/24 (2013.01); G02B 19/0023 (2013.01); G02B 19/0047 (2013.01); G02B 26/0833 (2013.01); G02B 26/101 (2013.01); G03F 7/70075 (2013.01); G03F 7/7085 (2013.01); G03F 7/70116 (2013.01); G03F 7/70825 (2013.01);
Abstract
A sensor device for capturing the displacement position of an optical component includes a plurality of stator electrodes and a mechanism or restricting the electric field that is relevant to the measurement of the displacement position to the region of the stator electrodes.