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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10512946 B1

PDFFull Text
Date of Patent:
Dec. 24, 2019

Filed:

Sep. 03, 2015

Gigasonic cleaning techniques

Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Inventors:

Ying-Hsueh Chang Chien, Hsinchu, TW;

Chi-Ming Yang, Hsinchu, TW;

Assignee:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Attorney:

Eschweiler & Potashnik, LLC

Primary Examiner:

Joseph L Perrin

Assistant Examiner:

Irina Graf

Int. Cl.
CPC ...
B08B 3/12 (2006.01); H01L 21/67 (2006.01); H01L 21/02 (2006.01); C11D 11/00 (2006.01); B06B 3/00 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
B08B 3/12 (2013.01); C11D 11/007 (2013.01); C11D 11/0047 (2013.01); H01L 21/02057 (2013.01); H01L 21/67057 (2013.01); B06B 3/00 (2013.01); H01L 22/12 (2013.01); H01L 22/26 (2013.01);
Abstract

The present disclosure provides a semiconductor cleaning system. The cleaning system includes a chamber to retain a cleaning solution, and a gigasonic frequency generator. The gigasonic frequency generator is configured to generate an electrical signal corresponding to a range of gigahertz frequencies. A transducer is configured to transform the electrical signal to a mechanical wave of pressure and displacement that propagates through the cleaning solution with oscillations within the range of gigahertz frequencies.

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Chien, Ying-Hsueh. (2019). Gigasonic cleaning techniques (U.S. Patent No. 10512946). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10512946

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