The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 17, 2019

Filed:

Apr. 18, 2019
Applicant:

Shindengen Electric Manufacturing Co., Ltd., Tokyo, JP;

Inventors:

Shunichi Nakamura, Saitama, JP;

Akihiko Sugai, Saitama, JP;

Tetsuto Inoue, Saitama, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 31/0312 (2006.01); H01L 29/10 (2006.01); H01L 21/04 (2006.01); H01L 29/06 (2006.01); H01L 29/08 (2006.01); H01L 29/16 (2006.01); H01L 29/66 (2006.01); H01L 29/739 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1045 (2013.01); H01L 21/0465 (2013.01); H01L 29/0696 (2013.01); H01L 29/086 (2013.01); H01L 29/1095 (2013.01); H01L 29/1608 (2013.01); H01L 29/66068 (2013.01); H01L 29/7395 (2013.01); H01L 29/7802 (2013.01);
Abstract

A silicon carbide semiconductor device includes: n type regions formed on a surface of the n− type epitaxial layer; p type body regions formed at positions deeper than the n type regions; p− type channel regions each reaching the p type body region; and n++ type source regions formed toward the p type body region from the front surface side of the epitaxial layer, and the p− type channel regions and the n++ type source regions are formed at a planar position where the n type region remains between the p− type channel region and the n++ type source region, and out of boundary surfaces which are formed between the p− type channel region and the n type regions, the boundary surface on an outer peripheral side is positioned inside an outer peripheral surfaceof the p type body region as viewed in a plan view.


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