The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 17, 2019

Filed:

Dec. 09, 2016
Applicants:

Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, TW;

National Taiwan University, Taipei, TW;

Inventors:

Jenn-Gwo Hwu, Taipei, TW;

Wei-Cheng Tian, Taipei, TW;

Po-Hao Tseng, Taichung, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C25D 5/02 (2006.01); C25D 7/06 (2006.01); C25D 9/06 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); C25D 11/00 (2006.01); C25D 11/02 (2006.01); C25D 11/32 (2006.01); C25D 17/00 (2006.01); C25D 17/06 (2006.01); H01L 21/02 (2006.01); H01L 29/06 (2006.01); H01L 29/40 (2006.01); H01L 29/423 (2006.01); H01L 29/786 (2006.01); H01L 29/775 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0673 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); C25D 5/02 (2013.01); C25D 7/0607 (2013.01); C25D 9/06 (2013.01); C25D 11/005 (2013.01); C25D 11/32 (2013.01); H01L 29/401 (2013.01); H01L 29/42364 (2013.01); H01L 29/42372 (2013.01); H01L 29/42392 (2013.01); H01L 29/775 (2013.01); H01L 29/78696 (2013.01); H01L 21/02603 (2013.01);
Abstract

Structures, devices and methods are provided for forming nanowires on a substrate. A first protruding structure is formed on a substrate. The first protruding structure is placed in an electrolytic solution. Anodic oxidation is performed using the substrate as part of an anode electrode. One or more nanowires are formed in the protruding structure. The nanowires are surrounded by a first dielectric material formed during the anodic oxidation.


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Hwu, Jenn-Gwo. (2019). Systems and methods for forming nanowires using anodic oxidation (U.S. Patent No. 10510837). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10510837

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