The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2019
Filed:
Oct. 23, 2017
Applicant:
Globalfoundries Singapore Pte. Ltd., Singapore, SG;
Inventors:
Assignee:
GLOBALFOUNDRIES SINGAPORE PTE. LTD., Singapore, SG;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 49/02 (2006.01); H01L 23/522 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 28/60 (2013.01); H01L 21/76877 (2013.01); H01L 23/5223 (2013.01); H01L 23/5228 (2013.01); H01L 28/20 (2013.01);
Abstract
A reliable metal insulator metal (MIM) capacitor is disclosed. The MIM capacitor is disposed over at least an interlevel dielectric (ILD) layer of a plurality of ILD layers with interconnects disposed over a substrate. The MIM capacitor includes a capacitor dielectric disposed between top and bottom metal capacitor electrodes. The edges of the top metal electrode at the interface with the capacitor dielectric are rounded. The rounded edges of the top capacitor electrode at the interface with the capacitor dielectric reduce edge electric field, thereby improves time-dependent dielectric breakdown (TDDB) reliability of the capacitor.