The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 17, 2019

Filed:

Sep. 25, 2018
Applicant:

University of Electronic Science and Technology of China, Chengdu, CN;

Inventors:

Ming Qiao, Chengdu, CN;

Chunlan Lai, Chengdu, CN;

Linrong He, Chengdu, CN;

Li Ye, Chengdu, CN;

Bo Zhang, Chengdu, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/06 (2006.01); H01L 29/06 (2006.01); H01L 29/739 (2006.01); H01L 29/78 (2006.01); H01L 29/08 (2006.01); H01L 21/768 (2006.01); H01L 21/3115 (2006.01); H01L 21/324 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0623 (2013.01); H01L 21/31155 (2013.01); H01L 21/324 (2013.01); H01L 21/76831 (2013.01); H01L 27/0629 (2013.01); H01L 29/0649 (2013.01); H01L 29/0696 (2013.01); H01L 29/086 (2013.01); H01L 29/0808 (2013.01); H01L 29/0821 (2013.01); H01L 29/0878 (2013.01); H01L 29/7393 (2013.01); H01L 29/7818 (2013.01);
Abstract

A BCD semiconductor device includes devices integrated on a single chip. The devices include a first high voltage nLIGBT device, a second high voltage nLIGBT device, a first high voltage nLDMOS device, a second high voltage nLDMOS device, a third high voltage nLDMOS device, a first high voltage pLDMOS device and low voltage NMOS, PMOS and PNP devices, and a diode device. A dielectric isolation is applied to the high voltage nLIGBT, nLDMOS and pLDMOS devices to realize a complete isolation between the high and low voltage devices. The nLIGBT, nLDMOS, NPN and low voltage NMOS and PMOS are integrated on the substrate of a single chip. The isolation region composed of the dielectric, the second conductivity type buried layer, the dielectric trench, and the first conductivity type implanted region realizes full dielectric isolation of high and low voltage devices. The six types of high voltage transistors have multiple channels.


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