The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 17, 2019

Filed:

Sep. 03, 2014
Applicant:

Lintec Corporation, Tokyo, JP;

Inventors:

Naoya Saiki, Koshigaya, JP;

Daisuke Yamamoto, Kawaguchi, JP;

Hiroyuki Yoneyama, Nagareyama, JP;

Youichi Inao, Saitama, JP;

Assignee:

Lintec Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); B23K 26/53 (2014.01); B32B 27/08 (2006.01); B32B 27/16 (2006.01); C08J 7/04 (2006.01); C09D 133/10 (2006.01); C09D 163/00 (2006.01); C09D 163/04 (2006.01); C09J 133/10 (2006.01); C09J 163/00 (2006.01); C09J 163/04 (2006.01); H01L 21/268 (2006.01); H01L 21/78 (2006.01); C09J 7/29 (2018.01);
U.S. Cl.
CPC ...
H01L 21/6836 (2013.01); B23K 26/53 (2015.10); B32B 27/08 (2013.01); B32B 27/16 (2013.01); C08J 7/042 (2013.01); C09D 133/10 (2013.01); C09D 163/00 (2013.01); C09D 163/04 (2013.01); C09J 7/29 (2018.01); C09J 133/10 (2013.01); C09J 163/00 (2013.01); C09J 163/04 (2013.01); H01L 21/268 (2013.01); H01L 21/78 (2013.01); B32B 2307/50 (2013.01); B32B 2307/548 (2013.01); B32B 2457/14 (2013.01); C08J 2333/10 (2013.01); C08J 2363/00 (2013.01); C08J 2363/04 (2013.01); C09J 2201/28 (2013.01); C09J 2203/326 (2013.01); H01L 2221/6834 (2013.01); H01L 2221/68313 (2013.01); H01L 2221/68327 (2013.01); H01L 2221/68336 (2013.01); H01L 2221/68377 (2013.01);
Abstract

A protective film forming filmis provided in which the product of the breaking stress (MPa) measured at a measurement temperature of 0° C. and the breaking strain (unit: %) measured at a measurement temperature of 0° C. in at least one of the protective film forming filmand a protective film formed from the protective film forming filmis in a range of 1 MPa·% to 250 MPa·%. According to such a protective film forming film, the protective film forming filmor the protective film formed from the protective film forming filmcan be suitably divided in an expanding process performed on a workpiece when the workpiece is divided to obtain a work product.


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